Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional Mass Flow and Pressure Meters and Controllers have needed a footprint of 1.5″, as for instance specified in the NeSSITM system. Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst High-Tech has developed the IQ+FLOW® Mass Flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75″, thereby realizing the ultra compact flow and pressure controllers.
The IQ+FLOW® concept offers the following functional modules:
Flow meter; typical flow ranges from 10 mln/min up to 5 ln/min (Full Scale values)
Pressure meter; typical pressure ranges of the order of 100 psi
Control valve
Three-way valve
Shut-off valve
Filter
Mixing chamber
A combination of these modules can be mounted on a compact manifold, in line with a customers requirement, and following open design discussions. Further possibilities might include either an aluminium or a stainless steel manifold with perhaps female inlet/outlet ports that could be suitable for either gas or liquid. As there are truly an infinite number of possible solutions we highly recommend you to contact Bronkhorst UK to discuss your application.
