Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5″, as for instance specified in the NeSSITM system. Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst High-Tech has developed the IQ+FLOW® mass flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75″, thereby realizing the ultra compact flow and pressure controllers.
High intrinsic quality, featuring…
Flow ranges from 0,2…10 mln/min up to 0,1…5 ln/min (Full Scale values)
Very stable Zero, due to the thermally balanced chip-sensor
Compact assembly ensures space efficiency
Economical solution, low cost of ownership
Fast response, down to 300 msec
Analog and digital (RS232 / RS485) communication
Based on the micro system technology of IQ+FLOW® series, Bronkhorst High-Tech also offers the possibility to combine functional modules on a compact manifold
